Hidden Costs of Toxic Gas Abatement

In transitioning from 300mm to 450mm wafer processing, the surface area of each wafer approximately doubles and so the mass of direct materials used in deposition and etch chambers can be expected to increase accordingly. Consequently, the cost to deliver and abate process chemicals will likewise double…unless we re-examine how our process tools are integrated […]

Sustainability of Future Fabs with Smart Utilities

Ben Peek began his career as a research chemist with Texas Instruments, R&D Labs, in the 1960s. His interest was surface chemistry (flat surfaces) and basic research in exotic semiconductor materials such as gallium arsenide (GaAs), germanium, indium phosphide (InP), indium antimonide (InSb), and mercury cadmium telluride (HgCdTe). These materials are today’s mainstays for speed […]